Technologies made possible by the capabilities in the Microsystems Prototyping Foundry have been recognized with R&D 100 Awards. These annual awards recognize the 100 technology products judged by a panel of technical experts to be the most significant new developments of the year.

2024

integrated circuit package

Engineered Substrates for Rapid Advanced Imaging Sensor Development

A fabrication process that dramatically reduces the development time and cost for advanced silicon imaging sensors by enabling a straightforward back-illumination process and uniform thinning on small batches of detectors.

interconnected chips forming the Megachip

Megachip

An approach that interconnects small specialized chips into a single-chip-like monolithic integrated circuit, capable of containing billions of transistors and reducing latency and energy costs for AI data processing. 

Superconducting chip

Superconductive Many-State Memory and Comparison Logic

Superconductive circuits that natively store and compare greater than two discrete states, without significantly increasing the number of devices or surface area of the circuits. 

2023

the quantum module is mounted on a copper mount, with fiber optic cables routed up from it.

Scalable Photonic Quantum Memory Module

A single unit that combines a photonic interface, loss-error correction, and an architecture able to accommodate multiple memory modules to enable high-rate, high-efficiency quantum networking for computing and distributed sensing

2021

Field-Programmable Imaging Array

Field-Programmable Imaging Array

A universal digital back end for camera systems which, when hybridized to an image detector array, results in a flexible and powerful digital processing system-in-package

Microhydraulic Motors

Microhydraulic Motors

A scalable, electrowetting-based actuation platform that offers a torque density two orders of magnitude higher than that of electric motors

2019

Gas Mapping LiDAR™

Gas Mapping LiDAR™ 

A sensor, built by Bridger Photonics and enabled by Lincoln Laboratory’s slab-coupled optical waveguide amplifier (SCOWA), that remotely detects, locates, and quantifies methane leaks and oil and gas infrastructure status

CODEVELOPERS: STAFF FROM BRIDGER PHOTONICS

2018

Very Large-Scale Integration Process for Superconducting Electronics

Very Large-Scale Integration Process for Superconducting Electronics

A fabrication process that taps into superconductivity to provide fast, energy-efficient integrated circuits for advanced computing, digital signal processing, quantum metrology, and sensing

2014

Curled Microelectromechanical Switch

Curled Microelectromechanical Switch

A curled-electrode switch that eliminates the sticking and contamination issues inherent in traditional electromechanical switches

CODEVELOPERS: STAFF FROM INNOVATIVE MICRO TECHNOLOGY

2010

Subwavelength-Separated Superconducting Nanowire Single-Photon Detector Array

Subwavelength-Separated Superconducting Nanowire Single-Photon Detector Array

A component in an optical detection system that enables broadband single-photon detection with high efficiency and low noise at rates exceeding one billion photons per second

CODEVELOPERS: RESEARCHERS FROM MIT
Geiger-Mode Avalanche Photodiode Detector Focal Plane Array

Geiger-Mode Avalanche Photodiode Detector Focal Plane Array

A two-dimensional array of ultrasensitive solid-state photodetectors, each of which can measure the arrival time of single photons